The present volume contains the proceedings of the 13th European Conference on Chemical Vapor Deposition (Eurocvd 13). CVD is one of the major techniques for the fabrication of micro- and nano-scale films, tubes, and particles. Enhanced implementation of CVD in actual and forthcoming advanced industrial processes will depend on the comprehension, control, and optimization of the "processing conditions - deposit microstructure (morphology, composition) - material performance" relations. Eurocvd 13 was recognized by the European Commission as a High Level Scientific Conference which meets clearly identified needs, such as : i) deeper insight into the fundamental phenomena which control the above correlation ; ii) identification of the materials issues where CVD can be used, scale up of the process, and co-ordination among chemical suppliers, equipment designers, software developers, and end-users ; iii) contribution to the improvement of the quality of life (as a consequence of enhanced performance of the materials produced), through the developments in fields such as microelectronics, energy storage, or hard and protective coatings ; iv) teaching and training of young researchers on the multiple aspects of CVD, and their interactions with the specialists in these fields.